Facilities available at Nanoscience

Nanoscience offers a wide range of equipment to our users. This page is under development. Contact Nanoscience's Lab Manager, Rick Bradley, to discuss your needs.

Clean Room Equipment:

  • Alphastep Profilometer
  • Technics RIE
  • RTP-600S
  • RTM2016-M-2-F (RTA)
  • Plasmaline Oxygen Plasma Asher
  • Ion Tech Reactive Ion Beam Etcher
  • Plasmatherm, SLR-770 ICP Etcher
  • Plasmaquest ECR Etcher
  • Samco SE-600-RAP PECVD
  • Temescal E-beam Metal Evaporator (2 ea)
  • CHA Mark 40 Dielectric Evaporator
  • JEOL 5800 SEM (tungsten emitter)
  • Photolithography
  • Wet Benches (acid, solvent, base)

Lithography Equipment:

  • Karl Suss MJB-3 proximity aligner
  • Headway coater track
  • 355 nm – IL (Interferometric Lithography) laser

Nanoscience facilities are distributed in three locations at the University of New Mexico - in the Center for High Technology Materials, the Department of Earth and Planetary Sciences, and the Center for Microengineered Materials.